DSM’s I-20 linear piezo stage combines a high-precision step and repeat piezo motor, non-magnetic crossed roller bearings, and a high-resolution linear encoder. The I-20 can be used as a precision linear stage or as a linear actuator to move other devices. Multiple I-20’s can be used create XY and XYZ stages. The internal step and repeat piezo motor offers smooth output motion and can push a load of up to 10 N. When idle, it can resist in-line loads of up to 15 N. The integrated low-friction crossed roller bearings allow the stage to carry very high off-axis loads, eliminating the need to design separate load-bearing elements. DSM’s MD-90 controller enhances the I-20 by adding closed loop positioning control, microstepping, and analog output modes. In the microstepping mode, the driver can vary the step size from the standard ~5 µm down to ~50 nm. In analog mode, the output stage varies using only the linear extension piezo to create smooth motion accurate to 20 nm.

The SUM-40 is a direct drive piezo ultrasonic motor with an integrated amplifier, controller, and optical encoder that gives the user closed loop control in a compact package. Despite its small size, the SUM-40 boasts a continuous torque of 50 mN-m while the integrated optical encoder provides 130 microradian resolution.

The SUM-40NM is a direct drive piezo ultrasonic motor with an integrated optical encoder that gives the user closed loop control in a compact package. Despite its small size, the SUM-40NM boasts a continuous torque of 50 mN-m while the integrated optical encoder provides 130 microradian resolution.